Multiple Integrated Tips Scanning Probe Microscope

ABSTRACT

Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. Provisional Patent ApplicationSer. No. 62/121,174, filed on Feb. 26, 2015 and entitled “MultipleIntegrated Tip Scanning Probe Microscope,” the entire disclosure ofwhich is incorporated herein by reference.

FIELD OF THE INVENTION

The present disclosure is directed generally to a multiple integratedtips scanning probe microscope for the characterization of thin filmsand devices.

BACKGROUND

Single-tip Scanning Probe Microscopes (SPM), such as the ScanningTunneling Microscope (STM) and Atomic Force Microscope (AFM), arecritical tools for the investigation of structural and electronicproperties of thin film materials and devices. For example, thesesingle-tip SPMs form one or more images of a thin film material ordevice using a physical probe that scans the target.

However, single-tip SPMs are limited to static measurements such as thelocal density of states and near-sample surface effects. As a result, arange of fundamental phenomena that exist in thin film materials anddevices are inaccessible. As just one example, the effects ofdislocations and grain boundaries in thin films cannot be characterized,as the ability to perform trans-conductance (conduction between twotips) measurements at the nanoscale is a critical gap. Trans-conductancewould enable a richer understanding of how electrons transport andinteract with their surroundings by offering insight into the localdensity of states, tip-sample coupling, transport mechanisms, scatteringphase shifts and inelastic free mean paths of electrons.

Multiple-tips SPMs have been proposed as a way of overcoming theinherent limitations of the single-tip SPM. However, there have beensignificant challenges to engineering a suitable multiple-tips SPM.Previous approaches to a multiple-tips SPM have relied on independentmacroscopically-fabricated probes. These platforms are complex,difficult to actuate, and have limited scale-down. They are alsoprohibitively expensive to manufacture.

Accordingly, there is a continued need in the art for multiple-tips SPMsthat are both cost-effective and easily manufactured and functionalizedto the specific investigation for which they will be utilized.

SUMMARY OF THE INVENTION

The present disclosure is directed to a multiple integrated tips (MiT)scanning probe microscope for the characterization of thin films anddevices. The MiT scanning probe microscope is a platform that integratesmechanical and electrical functionality in a monolithically-fabricatednano-structure which is tailored and functionalized to the specificinvestigation. The MiT probe provides two or more monolithicallyintegrated cantilever tips that can be placed within nanometers of eachother, with monolithically integrated capacitive actuators, sensors, andtransistors to amplify signals. As a result, the MiT SPM is able toperform atomic force microscopy without the need for laser tipalignment. Further, the MiT SPM is capable of nanoprobing surfaces whereat least two of the integrated tips are in direct contact or in closeproximity with the sample.

According to an aspect is a scanning probe adapter comprising a probehead having at least one probe tip; and an optical microscope configuredto view the probe head in relation to a sample.

According to an embodiment, the probe head is mounted on a stageconfigured to align the at least one probe tip relative to a sample.

According to an embodiment, the probe head is mounted above apiezoelectric sample stage configured to move the sample in at least twoaxes and further configured to move the sample past the probe forscanning.

According to an embodiment, the piezoelectric stage is mounted onto arotating stage configured to orient the sample in a particulardirection.

According to an embodiment, the stage is mounted onto: (i) a first stageconfigured to move the stage along a first, X axis; (ii) a second stageconfigured to move the stage along a second, Y axis; and (iii) a thirdstage configured to move the stage along a third, Z axis.

According to an embodiment, the probe head comprises a top component anda bottom component.

According to an embodiment, a probe comprising the probe tips is affixedto the probe head.

According to an embodiment, a probe comprising the probe tips is affixedto a board component, and the board component is affixed to the probehead.

According to an embodiment, the top component houses at least onetransimpedance amplifier.

According to an embodiment, the top component probe head houses at leastone spring loaded pogo pin, wherein the spring loaded pogo pin isconfigured to push against and make electrical contact to a boardcomponent or probe comprising the probe tips.

According to an aspect is method of attaching a scanning probe adapterto a scanning probe microscope. The method includes the steps of: (i)removing an existing probe head of the scanning probe microscope; and(ii) mounting the scanning probe adapter above a sample stage of thescanning probe microscope.

According to an aspect is a method of attaching a scanning probe adapterto a three-dimensional microscope. The method includes the steps of: (i)placing a sample stage under the three-dimensional microscope, whereinthe sample stage is configured to move the sample in at least two axes;and (ii) mounting the scanning probe adapter relative to the samplestage.

According to an embodiment, the three-dimensional microscope is anoptical microscope, a scanning electron microscope, or a transmissionelectron microscope.

According to an aspect is a method of operating a scanning probemicroscope. The method includes the steps of: (i) providing a probe withat least one tip, the probe comprising at least one monolithicallyintegrated actuator and sensor, wherein the monolithically integratedactuator is configured to actuate and oscillate the probe tip; and (ii)measuring, using the monolithically integrated sensor, a motion of theoscillating probe tip.

According to an embodiment, the at least one monolithically integratedactuator and sensor is capacitive, piezoelectric, piezoresistive, or acombination of capacitive, piezoelectric, and piezoresistive.

According to an aspect is a method of aligning at least two probe tipsin a scanning probe adapter. The method includes the steps of: (i)providing a probe head comprising at least two probe tips; (ii) biasingthe sample and the at least two probe tips with either an AC or DCsignal; (iii) moving, using a sample stage, the sample and the at leasttwo probe tips into proximity; (iv) measuring a current from each of theat least two probe tips; (v) comparing the measured currents todetermine which, if any, of the at least two probe tips generated ahigher current; and (vi) if one of the at least two probe tips generateda higher current, retracting the sample stage and rotating the probehead away from whichever of the at least two probe tips generated thehighest current, or determining that the at least two probe tips arealigned if equivalent currents are measured from the at least two probetips.

According to an embodiment, the method further includes the step ofrepeating the method until equivalent currents are measured from the atleast two probe tips.

According to an aspect is a method of aligning at least two probe tipsin a scanning probe adapter. The method includes the steps of: (i)providing a probe head comprising at least two probe tips; (ii) movingthe sample and the at least two probe tips into proximity; (iii)capturing, using an optical microscope, an image of the at least twoprobe tips and a corresponding reflection of the at least two probetips; (iv) tracking, using an image recognition algorithm, an outer lineshape of the at least two probe tips and the corresponding reflections;(v) calculating a distance between an apex each of the at least twoprobe tips and the apex of the corresponding reflection; (vi) comparingthe calculated distances to determine which, if any, of the at least twoprobe tips had a shorter calculated distance; and (vii) if one of the atleast two probe tips had a shorter calculated distance, rotating theprobe head away from whichever of the at least two probe tips had theshorter calculated distance, or determining that the at least two probetips are aligned if equivalent distances are calculated for each of theat least two probe tips.

According to an embodiment, the method further includes the step ofrepeating the method until equivalent distances are calculated from theat least two probe tips.

According to an aspect is a method for characterizing a sample using ascanning probe adapter. The method includes the steps of: (i) providinga probe head comprising at least two probe tips; (ii) aligning the atleast two probe tips; (iii) scanning the sample with at least one of theat least two probe tips to obtain a first measurement; and (iv)performing at least one of storing the obtained first measurement,transmitting the obtained first measurement, and displaying the obtainedfirst measurement.

According to an embodiment, the method further includes the step ofcontacting the sample with at least one of the at least two probe tipsto obtain a second measurement.

According to an embodiment, the second measurement is an electricalmeasurement, a mechanical measurement, an optical measurement, or achemical measurement.

These and other aspects of the invention will be apparent from theembodiment(s) described hereinafter.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be more fully understood and appreciated byreading the following Detailed Description in conjunction with theaccompanying drawings, in which:

FIG. 1 is an image of a multiple integrated tips scanning probemicroscope system, in accordance with an embodiment.

FIG. 2 is a top view image of an MiT probe, in accordance with anembodiment.

FIG. 3A is a schematic representation of a resistance map of a thinfilm, in accordance with an embodiment.

FIG. 3B is a schematic representation of an MiT-SPM scanning the thinfilm of FIG. 3A, in accordance with an embodiment

FIG. 4 is a schematic representation of an MiT probe alignment protocolin nanoprobing mode, in accordance with an embodiment.

FIG. 5 is a schematic depiction of a tunneling current (It) convertedinto a voltage and fed to a Data Acquisition system (DAQ), in accordancewith an embodiment.

FIG. 6 is a graph of a 5 μm by 5 μm resistance map of HOPG film createdby an MiT probe in nanoprobing mode, in accordance with an embodiment.

FIG. 7 is an optical image of the tips of an MiT probe and theircorresponding reflections, in accordance with an embodiment.

FIG. 8A is an image of the actuation of a MiT probe with all the tipsgrounded, in accordance with an embodiment.

FIG. 8B is an image of the actuation of a grounded center tip of an MiTprobe with voltages applied to the side tips, in accordance with anembodiment.

FIG. 8C is an image of the actuation of a grounded center tip of an MiTprobe with voltages applied to the side tips, in accordance with anembodiment.

FIG. 9 is a schematic representation of an MiT probe in STM mode, inaccordance with an embodiment.

FIG. 10 is a schematic representation of a single-ended configuration inmeasuring the resonance frequency, amplitude and phase of an MiT probe,in accordance with an embodiment.

FIG. 11 is a graph of frequency response measurement of a moving tip ofan MiT probe in AFM mode, in accordance with an embodiment.

FIG. 12 is a schematic representation of a configuration for an MiTprobe in AFM mode, in accordance with an embodiment.

FIG. 13 is a schematic representation of the electrical connections inan MiT-SPM, in accordance with an embodiment.

FIG. 14 is a schematic representation of an MiT-SPM without anintegrated sample stage, in accordance with an embodiment.

DETAILED DESCRIPTION OF EMBODIMENTS

The present disclosure describes various embodiments of a multipleintegrated tips scanning probe microscope for the characterization ofthin films and devices. The MiT-SPM enables nanoscale atomic imaging, aswell as electrical probing of trans-conductance, in ambient air withoutrequiring a scanning electron microscope. The device provides fordetailed studies of transport mechanisms in thin film materials anddevices.

Referring now to the drawings, wherein like reference numerals refer tolike parts throughout, there is seen in FIG. 1, in one embodiment, amultiple integrated tip scanning probe microscope system 10. The MiT-SPMsystem includes the MiT probe 12, which can be wire-bonded to a printedcircuit board (PCB) 30. The MiT-SPM also includes a scanning probe head14, which houses the transduction electronics including thetransimpedance amplifier (TIA) which converts the tunneling current intovoltage, as discussed in greater detail below. A rotating stage 16aligns the MiT probe 12 to the surface of the sample 18, which ismounted on an SPM stage 20. MiT-SPM system 10 also includes an opticalmicroscope 22, which is utilized for coarse approach visualization ofthe sample in relation to the MiT probe tips. The system also includes aseries of stages to allow long-range movement in the X, Y, and Z axes,including the X-translation stage 26, the Y-translation stage 28, andthe Z-translation stage 24. According to an embodiment, a softwarealgorithm is utilized to control the probe head and stages during use,as discussed in greater detail below.

Referring now to FIG. 2, in one embodiment, a top view of the MiT probe12 is provided. According to an embodiment three MiT tips 32, 34, and 36in tip region 100 of the MiT probe can be co-fabricated, although theycould also be assembled after production. The center tip 34 is allowedto move relative to the two fixed outer tips using one or moreactuators, including but not limited to the actuators depicted in FIG.2. These actuators cause center tip 34 to be displaced relative to theouter tips 32 and 36.

According to an embodiment, center tip 34 can be displaced approximately200 nm in both the longitudinal and lateral directions within the planeof the wafer, and this motion is sensed through detection component.Among other possible detection elements, the detection component may bea capacitively-coupled junction gate field-effect transistor (JFET)preamplifier (J1) 38. According to another embodiment of the detectioncomponent, electrodes C1 48 and C2 50 can serve as differentialcapacitors which can be used to measure the displacement of the middletip.

According to an embodiment, center tip 34 may be actuated along they-axis using the electrostatic plate actuators F1 and F2, denoted bynumerals 40 and 42. The actuators can function cooperatively, forexample, to displace the movable probe tip 34. Center tip 34 can bemoved along the x-axis using the electrostatic forces between actuatorF3, denoted by numeral 44, and center tip 34. FIG. 2 also shows thestoppers (S) 46, which restrict motion of center tip 34 and JFET 38.

According to an embodiment, MiT-SPM can operate in at least three mainmodes to obtain data about a sample, as well as a combination of thesemodes. The three main modes are nanoprobing, AFM, and STM, discussed ingreater detail below. However, it should be noted that the MiT-SPM canoperate in modes other than those specifically described herein.

Nanoprobing Mode

Nanoprobing mode can be used to identify opens, shorts, and grainboundaries in thin film, among other possible uses. Referring to FIG. 3Ais an illustration of the resistance map of a thin film 300, with a unitcell shown by the dashed box 310. Region 310 of the thin film 300 isalso shown in FIG. 3B, together with the tip region 100 of an MiT probe12. Referring to FIG. 3B, voltage is applied to center tip 34, with theside tips 32 and 36 grounded. Measured currents between the tips giveconductance information of a particular region. Since there is an “open”region 320 in the thin film between the center tip 34 and side tip 36,there will be negligible amount of current 12 and, as such, a highresistance. The detection system will recognize and interpret this highresistance. The nanoprobing mode can also be used to measure the deviceperformance of three-dimensional structures such as planar transistorsand FinFETs, among many others.

According to an embodiment, in nanoprobing mode the MiT probe ispreferably aligned perpendicular to the sample surface to ensure thatboth side tips of the MiT probe are in contact with the sample. Anexample of an alignment protocol is illustrated in FIG. 4.

In step 4A of FIG. 4, the SPM stage 20 is biased and the MiT probeapproaches the sample 18 at any angle. Although a specific angle isdepicted in FIG. 4, the actual angle can be any angle. In step 4B,center tip 34 is electrostatically retracted by applying voltage toelectrode F3 (shown in FIG. 2). The side tips of the MiT probe aregrounded and a voltage is applied to the sample. As the sampleapproaches the tips, electrons tunnel from the side tips 32 and 36 tothe sample 18 or vice versa.

Referring to FIG. 5, in one embodiment, the tunneling current (It) fromthe MiT probe 12 is converted into a tunneling voltage by an onboardtransimpedance amplifier (TIA) 500. The output of the TIA 500 isconnected to a data acquisition (DAQ) system 510 and sampled, such as ata rate of 2 kHz although other rates are possible. The sampled voltagesundergo signal processing by first being filtered with a bandstop filterthat removes noise, such as 60 Hz noise in this example, and then theirmean voltage values are evaluated. The mean voltage values from Tip 1and Tip 2 are then put into the “control box” which implements the statemachine illustrated in TABLE 1.

TABLE 1 State machine for the alignment of side tips 32 and 36. Tip 1Tip 2 Output Instruction 0 0 No tunneling Move Z-piezo until tunneling 01 Tunneling from Tip 2 Retract Z-piezo and rotate CW, XY lateraltranslation 1 0 Tunneling from Tip 1 Retract Z-piezo and rotate CCW, XYlateral translation 1 1 Tunneling from both tips Tips are aligned,perform measurements

According to an embodiment, with 1 V applied to the sample, a tunnelingcurrent of about 1 nA is expected assuming the tip-sample spacing is ˜1nm with an impedance of 1 GΩ. This tunneling current is converted by the1 GΩ feedback resistor in the TIA 500 to generate an output voltage of 1V. A tolerance of 0.1 V is set such that if the tunneling voltage is 10%away from the setpoint (1 V), the tip is considered to be in thetunneling regime. Relying on TABLE 1, when there is no tunneling currentsensed, the Z-piezo moves 4 nm where the DAQ then samples the tunnelingcurrent from both tips. If there is no tunneling current, the Z-piezocontinues to move 4 nm until tunneling current is sensed from eitherside tip or both tips. If current is sensed at one of the side tips, theZ-piezo retracts and the MiT Scanning Probe head (which contains MiTprobe and electronics) rotates clockwise (CW) or counterclockwise (CCW)away from the tip that generated the tunneling current.

In step 4C of the alignment protocol depicted in FIG. 4, rotation placescenter tip 34 at a different location relative to its original positionin step A. In step 4D of the protocol, X- and Y-lateral translation ofthe sample stage is carried out to position the sample to the originallocation. The Z-piezo movement, rotation and lateral translation isreiterated until equivalent currents are sensed from both tips,indicating a successful tip-alignment.

And in step 4E of the protocol, in order to have suitable sample-tipcontact, the Z-piezo is further moved-in an extra 10 nm beforeelectrical characterization is carried out. To preserve the integrity ofthe sharpness of the middle tip, the middle tip can stay retracted andthe side tips used for nanoprobing. Once the MiT probe is in softcontact with the sample, the sample bias is turned off and the samplestage is electrically floated through a relay that is connected to theSPM stage. Current-Voltage (IV) measurements are conducted by groundingone of the side tips and applying voltage ramps to the other. Thealignment and nanoprobing routines are repeated for each spot in aconductance map.

As shown in FIG. 6, the MiT probe in nanoprobing mode was used to mapthe resistance of HOPG film, where the measured resistance values rangefrom 7 kΩ for continuous regions and 170 MΩ for non-continuous regions.

Another way of aligning the side tips is via an optical technique wherethe tips are brought into close proximity with a sample surface and anoptical image is periodically captured of the tips and their reflectedimages as shown in FIG. 7. At each Z-piezo movement, an optical image iscaptured and processed. From the acquired image, the number of pixelsbetween each tip and its reflected image is calculated. A softwarealgorithm is used to calculate the distance (pixels) between each tipand its reflected image. The MiT probe is retracted and rotated awayfrom the tip with the shortest tip-sample distance. The Z-piezo movementand rotation is reiterated until there is equivalent distance betweeneach tip and the sample.

In nanoprobing mode, a low tip-sample contact resistance is crucial forachieving good electrical response. According to an embodiment, when aprobe contacts a substrate, the contact resistance can be modeled usingthe following equation:

$\begin{matrix}{R_{c} = {\frac{\rho_{probe} + \rho_{substrate}}{4\; {na}} + \frac{\sigma_{{oxide} - {film}}}{A_{contact}}}} & \left( {{Eq}.\mspace{14mu} 1} \right)\end{matrix}$

where ρ_(probe) and ρ_(substrate) represent the resistivity of the probeand substrate respectively, n is the number of asperities and “a” is thediameter of the probe tip. If the contact area (A_(contact)) has anoxide thin film resistance (σ_(oxide−film)), this would increase thecontact resistance. The workfunctions of the probe and substrate have tobeen chosen carefully in order to avoid making Schottky contact. Allmetal MiT probe have been fabricated. Also, different metal can besputtered onto the MiT probe to change its workfunction.

According to an embodiment, an algorithm is utilized to control theMiT-SPM. For example, the software can be developed in a variety ofsoftware suites, including but not limited to LabVIEW. The algorithm mayinclude control, thresholds, or settings for, among other things,movement of the sample stage, tunneling, voltage, current, and others.The algorithm may also include one or more outputs for the user tovisualize a graphical representation of the resistance map, topography,as well as monitor current and voltage measurements. Many other settingsand outputs are possible.

According to an embodiment, the MiT probe and MiT-SPM can be used toinvestigate the various charge transport transitions from localize todiffusive to ballistic transport in thin films. Being able to capturethese transitions will provide a deeper understanding of theconductivity of thin films. However, tunability of spacing is necessaryto enable these investigations. Ballistic transport occurs when thedistance between the two probes is less than both the momentumrelaxation length and the phase relaxation length. There is noscattering and when the Fermi wavelength is comparable to the spacing,quantized conductance occurs. In the case the spacing is greater thanthe momentum relaxation length, there is scattering and reducedtransmission and this regime is diffusive. In localize transport regime,the spacing is greater than both the phase relaxation length andmomentum relaxation length.

The spacing between the middle tip and either of the side tips can bereduced by applying voltage ramps to either electrode F1 or F2. Alsoapplying voltages to Tip 1 and Tip 2 would laterally deflect the middletip. Referring to FIGS. 8A-8C is the actuation of center tip 34 withvoltages applied to the side tips while the middle tip is grounded. Bymodulating the gap, transport phenomena such as transitions fromlocalized, diffusive and ballistic transport can be investigated. InFIG. 8A, all the tips are grounded, while in FIG. 8B a +3.5 V is appliedto Tip 1, and in FIG. 8C a +3.5 V is applied to Tip 2.

STM Mode

When a conducting tip is brought into close proximity (<1 nm) to aconducting sample and a potential difference is applied between the tipand the sample, electrons tunnel from the tip to the sample or viceversa. The measured tunneling current can give information aboutworkfunction differences, density of states and also by scanning the tipacross the sample, topography and atomic information can be acquired.The conventional STM uses a single tip, but MiT-SPM uses multipleintegrated tips which have to be aligned perpendicular to the samplesurface to avoid the side tips from scratching the sample. The alignmentprotocol for the STM mode is the same approach as used in thenanoprobing mode and described in reference to FIG. 4. After the tipsare aligned, the DC biased on F3 is removed and the middle tip of theMiT probe is extended and used for STM imaging.

According to an embodiment, the STM mode of operation is either theconstant current or constant height modes. In constant current mode, thetip will track the topography of the sample surface with the help of aProportional-Integral-Differential (PID) feedback controller. Accordingto an embodiment, the PID controller is implemented in software. Inconstant height mode, there is no Z-piezo movement during the imaging ofthe sample as shown in FIG. 9, which shows the STM in both constantcurrent and constant height modes.

According to an embodiment, the same hardware that was used for thenanoprobing mode can be used for the STM mode. Stability of the entireMiT-SPM system is crucial to achieving atomic imaging of thin films. TheSPM is susceptible to various sources of drift or instability, asdescribed in greater detail below.

The suspended MiT probe can be susceptible to fundamental Brownian noisedisplacement. In order to achieve atomic imaging, the Brownian noisedisplacement must be orders of magnitude lower than the interatomicdistance of the thin film. The Brownian noise displacement can beevaluated using the following equation:

$\begin{matrix}{\overset{\_}{x} = {\sqrt{\frac{4k_{B}{Tb}}{k^{2}}\left\{ \frac{1}{\left\lbrack {1 - \left( \frac{\omega}{\omega_{O}} \right)^{2}} \right\rbrack^{2} + \frac{\omega^{2}}{\left( {Q\; \omega_{O}} \right)^{2}}} \right\}}m\text{/}\sqrt{Hz}}} & \left( {{Eq}.\mspace{14mu} 2} \right)\end{matrix}$

where k_(B) is the Boltzmann constant (1.38066×10⁻²³ J/K), T is thetemperature (300 K), b is the damping coefficient (1.31×10⁻⁷ N s/m), kis the spring constant (2.56 N/m), ω₀ is the measured resonancefrequency (1.95×10⁶ rad/s) and Q is the quality factor (˜10). Atresonance, the Brownian noise force is expected to be 46.6×10⁻¹⁵N/√{square root over (Hz)} and the mean noise displacement 1.82×10⁻¹³m/√{square root over (Hz)}. Assuming the bandwidth of measurement of 100Hz, the displacement of the probe tip by Brownian noise will be 1.8picometers. For example, this Brownian noise displacement of the tip istwo orders of magnitude lower than the inter-atomic distance of HOPGproviding sufficient SNR for lateral measurement. Thus, drift from theMiT probe is negligible.

Aging of the tips during continuous nanoprobing will change the probecontact resistance. Depending on the measurement, a threshold contactresistance is set and routinely monitored and if the contact resistanceexceeds this value the tip is replaced.

Thermal drift can be a common problem in commercial SPMs. For example,the metals that are used in the assembly of SPMs have a coefficient ofthermal expansion. Temperature variations during measurements wouldgenerate thermal drift which will cause the position of the tip relativeto the sample to drift over tens or even hundreds of nm during theentire scanning process. The end effect would be images that arestretched, skewed or distorted. Some of the techniques commonly used tominimize thermal drift include operating the SPM in a cryostat orscanning very fast (video rate imaging) such that the drift becomesnegligible. Because the MiT probe and MiT-SPM may be operated in ambientair and at normal STM/AFM scanning rates, a drift compensating algorithmcan be implemented on the acquired images. According to an embodiment,the drift compensation steps could be: (1) Image Acquisition; (2) DriftVelocity Measurements; (3) Parameters for drift model; and (4) Driftcompensation, among other steps.

According to an embodiment, lateral drift (x and y) is compensated bytracking the position of a stationary component on a calibration sampleover time through consecutive up and down scans and monitoring thelocation offset. Vertical drift on the other hand is compensated bymeasuring the height variations at a particular point over time throughconsecutive up and down scans of that point.

AFM Mode

AFM typically utilizes a single cantilever tip that can be excited by apiezoelectric material attached to the base of the cantilever. Thevibrations of the cantilever are measured with a laser that is incidenceat the tip of the cantilever and the reflected laser signal is collectedonto a quadrature photodetector. Optical transduction(laser-photodetector) is preferred because it offers a better low noisesignal transduction, but these laser systems are bulky and expensive.Also, it takes time and experience to align the laser to the tip of thecantilever. The laser beam can also excite electron/hole pairs in thematerial that is being characterized. Because of these disadvantages ofoptical transduction, electrical transduction is a viable option.

According to an embodiment, the MiT-SPM does not require lasers for tipalignment. Instead, electrical signals are sent to the MiT probe toactuate the middle probe and this motion is also sensed electrically byusing capacitive comb-drives. Capacitive transduction is used due tofabrication simplicity, high sensitivity and low noise performance. Whena vibrating AFM tip is brought into close proximity to a sample surface,there exist an atomic force between the tip and the sample. This atomicforce acts on the tip to change its vibrational frequency, amplitude andphase. This change in the response of the tip is used to form atopographical image of the sample surface. Whereas STMs require apotential difference between the tip and sample, AFMs do not and can beused to image insulating materials. Since the MiT probe can be made ofconducting metal, it can be used in the AFM mode (as a conductive-AFM)to characterize both conducting and insulating materials.

According to an embodiment, in the AFM mode the middle tip 34 is excitedin resonance by applying AC signals to electrode F3 and the middle tipis scanned along the sample. Using a setup such as the one depicted inFIG. 10, the resonance frequency, amplitude and phase of the vibratingmiddle tip can be measured. A lock-in amplifier can be used to create anAC sweep that is combined with DC voltage through a bias-tee andlaunched on electrode F3. The AC signal will cause the middle tip tovibrate and the displacement current between F3 and middle tip(generated from the vibrations) can be fed into a low noisetransimpedance amplifier (TIA) with sensitivity set to 5 nA/V. Theoutput voltage of the TIA is fed back into the lock-in amplifier fordemodulation into magnitude and phase. The driving AC frequency is usedto demodulate the phase and amplitude of the output signal. FIG. 11displays the measured frequency response of the middle tip. According toan embodiment, electrodes C1 and C2 can serve as differential capacitorswhich can be used to measure the displacement of the middle tip.

Referring now to FIG. 11 is a graph of frequency response measurement ofa moving tip in a vacuum at a pressure of 1.9×10⁻³ mbar, in accordancewith an embodiment. According to this experimental setup, the resonancefrequency of the tip was measured to be 239.7 kHz. Depicted in the insetof FIG. 11 is the optical measurement of the resonance frequency whichwas 291.5 kHz. The calculated resonance frequency of 310 kHz was inagreement with the optically measured results. The spring constant ofthe middle tip was 2.56 N/m, indicating that sufficient stiffness isobtained for precision placement and contact force without buckling thetip. This measurement technique can extended to measure and trackchanges in the resonance frequency, amplitude and phase of the middletip as it scans a surface. At resonance, the resonance frequency isgiven by the following equation:

$\begin{matrix}{f_{0} = {\frac{1}{2\pi}\sqrt{\frac{k_{eff}}{m}}}} & \left( {{Eq}.\mspace{14mu} 3} \right)\end{matrix}$

where F is the electrostatic driving force provided by electrode F3,k_(eff) is the effective spring constant of the middle tip, Q is thequality factor, ω₀ is the fundamental angular resonance frequency, and mis the mass of the middle tip. According to an embodiment, FIG. 12illustrates a laser-less setup for the AFM mode of operation.

According to an embodiment, the measurement resolution and bandwidth ofthe AFM is limited by the injection of noise into the MiT probe's outputsignal. The noise from the printed circuit board 30, the TIA 500 and thelock-in amplifier, for example, can be analyzed. The input noise of thelock-in amplifier would vary with the gain of the TIA. In order toachieve higher signal-to-noise ratio's, the TIA's noise floor and gainwill be reduced. Due to the high stiffness of the MiT probe, it isexpected that the thermomechanical noise of the probe would benegligible compared to the other noise sources.

Force curves represent the amplitude of vibration of the tip at a givendriving frequency as a function of the tip-sample distance. When the tipis in proximity with the sample surface, an interaction force (f_(ext))acts on it. The vibration of the tip can be modeled as a harmonicoscillator, as shown by the following equation:

m _(eff) {umlaut over (z)}+yż+k _(eff) z=f _(ext) +f cos(ωt)   (Eq. 4)

where m_(eff) is the effective mass of the vibrating tip, y is thedamping factor, k_(eff) is the effective spring constant, f_(ext) is theexternal force acting on the probe tip and z is the tip displacement.According to equation:

$\begin{matrix}{\gamma = \frac{\omega_{o}m_{eff}}{Q}} & \left( {{Eq}.\mspace{14mu} 5} \right)\end{matrix}$

the fundamental angular resonance frequency of the tip is ω₀ and thequality factor is Q. The vibration amplitude is given by equation (6)and the phase is derived in equation (7):

$\begin{matrix}{{A(\omega)} = {\frac{f}{k_{eff}}\left( \frac{1}{\sqrt{\left( {1 - \frac{\omega^{2}}{\omega_{0}^{2}}} \right)^{2} + {\frac{1}{Q^{2}}\frac{\omega^{2}}{\omega_{0}^{2}}}}} \right)}} & \left( {{Eq}.\mspace{14mu} 6} \right) \\{{\theta (\omega)} = {{arc}\; {\tan\left( \frac{\frac{\omega}{\omega_{o}}}{Q\left( {\frac{\omega^{2}}{\omega_{o}^{2}} - 1} \right)} \right)}}} & \left( {{Eq}.\mspace{14mu} 7} \right)\end{matrix}$

As the tip approaches the surface, its vibrational amplitude isdecreased as its fundamental resonance frequency is increased due torepulsive interactions with the surface. When the probe is in permanentcontact with the sample, there is no oscillation. The Z-piezodisplacement from the onset of intermittent contact to permanent contactrepresents the free amplitude of vibration of the tip.

According to an embodiment, the force curve is an important measurementbecause it provides the necessary information needed to select theappropriate setpoint amplitude for the feedback loop to acquire AFMimages. The setpoint amplitude value should be lower than the freevibration amplitude to ensure that the tip interacts with the atomicforces on the surface but not too low for the tip to crash into thesample.

According to an embodiment, in order to obtain an AFM image, analgorithm-implemented PID controller is used to keep constant the outputamplitude signal equal to the setpoint. This can be achieved bymodulating the Z-piezo as the tip scans the sample. The recorded Z-piezodisplacement values are post-processed to generate the surfacetopography.

According to an embodiment, the MiT-SPM is able to perform sequentialatomic imaging and nanoprobing in both ambient air and vacuumconditions. In STM/AFM-nanoprobing mode, an STM/AFM image is firstacquired and this image is used as feedback to position the MiT probe ata particular location on the sample for nanoprobing measurement orsurface conductance mapping. Accordingly, the STM/AFM-nanoprobing modeis a very powerful technique for doing nanoscale electrical probingwithout the use of an SEM.

Referring now to FIG. 13 is a schematic of the electrical connections ofa MiT-SPM in accordance with an embodiment. These connections allow forAFM, STM, and Nanoprobing operation of the MiT-SPM. The tips areconnected through a series of relays/switches (Sw1-Sw6) to thetransimpedance amplifiers, DC/AC signal sources, data acquisitionmodules (DAQ), AFM and STM controllers. The sample is biased byconnecting a DC/AC signal source through switch (Sw7).

Alignment: During alignment routines, all the switches are open but Sw1,Sw6, and Sw7 are closed. The transimpedance amplifiers have a feedbackresistor (R1 and R2) and present a virtual ground to the tips. Thesample is biased with a DC/AC signal source. The tunneling current fromthe side tips are converted into tunneling voltage by the transimpedanceamplifier and fed into the DAQ. The DAQ uses these tunneling voltages todecide which direction to rotate the MiT Scanning Probe head.

STM Mode: After alignment of the tips, the middle tip is used for eitherSTM or AFM analysis. For STM operation, all the switches are open butSw3 and Sw7 are closed. The tunneling current through the middle tip isconverted into voltage by the feedback resistor R2. The DAQ records andmanipulates the voltage signal and sends commands to the STM controller.The STM controller then instructs the microscope to perform eitherconstant current or constant height scanning of the sample.

AFM Mode: In AFM operation, the integrated tips are aligned to thesample surface and the middle tip is excited in resonance. All theswitches are open but Sw3 is closed. The motional current through themiddle tip is converted into a motional voltage by the feedback resistorR2. The motional voltage is recorded by the DAQ and manipulated. Themanipulated signal is sent to the AFM controller which determineschanges in vibrational frequency, amplitude and phase. The AFMcontroller then sends command signals to the SPM stage to allow forvarious AFM measuring modes such as contact mode and tapping mode.

Nanoprobing Mode: After the alignment of the tips to the surface of thesample, all the switches are opened but Sw2, Sw4, and Sw5 are closed.The tips are brought in direct contact or in proximity with the sample.With the sample electrically floating, trans-conductance measurementsbetween the tips can be investigated. In certain applications, thesample switch Sw7 can be closed and this would allow for back-biasingthe sample.

Referring to FIG. 13, an embodiment of an MiT-SPM without an integratedsample stage is provided. According to an embodiment, the MiT-SPMAdapter (MiT-SPM without the sample stage) can be mounted into existingsingle tip SPMs to leverage the sample stage in these microscopes. Theadapter consists of all the components shown in FIG. 1, but without thesample stage. According to an embodiment as shown in FIG. 14, theMiT-SPM Adapter can be integrated to a commercially-available single tipSPM, such as the JEOL SPM. According to this embodiment, the NI USB 6259is the hardware that would send instructions to the JEOL SPM, and theMiT-SPM Adapter is mounted on top of the sample stage of the JEOL SPM.Many other configurations are possible.

While various embodiments have been described and illustrated herein,those of ordinary skill in the art will readily envision a variety ofother means and/or structures for performing the function and/orobtaining the results and/or one or more of the advantages describedherein, and each of such variations and/or modifications is deemed to bewithin the scope of the embodiments described herein. More generally,those skilled in the art will readily appreciate that all parameters,dimensions, materials, and configurations described herein are meant tobe exemplary and that the actual parameters, dimensions, materials,and/or configurations will depend upon the specific application orapplications for which the teachings is/are used. Those skilled in theart will recognize, or be able to ascertain using no more than routineexperimentation, many equivalents to the specific embodiments describedherein. It is, therefore, to be understood that the foregoingembodiments are presented by way of example only and that, within thescope of the appended claims and equivalents thereto, embodiments may bepracticed otherwise than as specifically described and claimed.Embodiments of the present disclosure are directed to each individualfeature, system, article, material, kit, and/or method described herein.In addition, any combination of two or more such features, systems,articles, materials, kits, and/or methods, if such features, systems,articles, materials, kits, and/or methods are not mutually inconsistent,is included within the scope of the present disclosure.

The above-described embodiments of the described subject matter can beimplemented in any of numerous ways. For example, some embodiments maybe implemented using hardware, software or a combination thereof. Whenany aspect of an embodiment is implemented at least in part in software,the software code can be executed on any suitable processor orcollection of processors, whether provided in a single device orcomputer or distributed among multiple devices/computers.

What is claimed is:
 1. A scanning probe adapter comprising: a probe headhaving at least one probe tip; and an optical microscope configured toview the probe head in relation to a sample.
 2. The scanning probeadapter of claim 1, wherein the probe head is mounted on a stageconfigured to align the at least one probe tip relative to a sample. 3.The scanning probe adapter of claim 1, wherein the probe head is mountedabove a piezoelectric sample stage configured to move the sample in atleast two axes and further configured to move the sample past the probefor scanning.
 4. The scanning probe adapter of claim 3, wherein thepiezoelectric stage is mounted onto a rotating stage configured toorient the sample in a particular direction.
 5. The scanning probeadapter of claim 2, wherein, the stage is mounted onto: (i) a firststage configured to move the stage along a first, X axis; (ii) a secondstage configured to move the stage along a second, Y axis; and (iii) athird stage configured to move the stage along a third, Z axis.
 7. Thescanning probe adapter of claim 1, wherein the probe head comprises atop component and a bottom component.
 8. The scanning probe adapter ofclaim 1, wherein a probe comprising the probe tips is affixed to theprobe head.
 9. The scanning probe adapter of claim 1, wherein a probecomprising the probe tips is affixed to a board component, and saidboard component is affixed to the probe head.
 10. The scanning probeadapter of claim 1, wherein said probe head houses at least onetransimpedance amplifier.
 11. The scanning probe adapter of claim 1,wherein said probe head houses at least one spring loaded pogo pin,wherein said spring loaded pogo pin is configured to push against andmake electrical contact to a board component or a probe comprising theprobe tips.
 12. A method of attaching a probe head to a scanning probemicroscope, the method comprising the steps of: removing an existingprobe head of the scanning probe microscope; and mounting a probe headaccording to claim 1 above a sample stage of the scanning probemicroscope.
 13. A method of attaching a probe head to athree-dimensional microscope, the method comprising the steps of:placing a sample stage under the three-dimensional microscope, whereinthe sample stage is configured to move the sample in at least two axes;and mounting a probe head according to claim 1 relative to the samplestage.
 14. The method of claim 13, wherein the three-dimensionalmicroscope is an optical microscope, a scanning electron microscope, ora transmission electron microscope.
 15. A method of operating a scanningprobe microscope, the method comprising the steps of: providing a probewith at least one tip, the probe comprising at least one monolithicallyintegrated actuator and sensor, wherein the monolithically integratedactuator is configured to actuate and oscillate the probe tip; andmeasuring, using the monolithically integrated sensor, a motion of theoscillating probe tip.
 16. The method of claim 15, wherein said at leastone monolithically integrated actuator and sensor is capacitive,piezoelectric, piezoresistive, or a combination of capacitive,piezoelectric, and piezoresistive.
 17. A method of aligning at least twoprobe tips in a scanning probe adapter, the method comprising the stepsof: providing a probe head comprising at least two probe tips; biasing asample and the at least two probe tips with either an AC or DC signal;moving, using a sample stage, the sample and the at least two probe tipsinto proximity; measuring a current from each of the at least two probetips; comparing the measured currents to determine which, if any, of theat least two probe tips generated a higher current; and if one of the atleast two probe tips generated a higher current, retracting the samplestage and rotating the probe head away from whichever of the at leasttwo probe tips generated the highest current, or determining that the atleast two probe tips are aligned if equivalent currents are measuredfrom the at least two probe tips.
 18. The method of claim 17, furthercomprising the step of repeating the method until equivalent currentsare measured from the at least two probe tips.
 19. A method of aligningat least two probe tips in a scanning probe adapter, the methodcomprising the steps of: providing a probe head comprising at least twoprobe tips; moving the sample and the at least two probe tips intoproximity; capturing, using an optical microscope, an image of the atleast two probe tips and a corresponding reflection of the at least twoprobe tips; tracking, using an image recognition algorithm, an outerline shape of the at least two probe tips and the correspondingreflections; calculating a distance between an apex each of the at leasttwo probe tips and the apex of the corresponding reflection; comparingthe calculated distances to determine which, if any, of the at least twoprobe tips had a shorter calculated distance; and if one of the at leasttwo probe tips had a shorter calculated distance, rotating the probehead away from whichever of the at least two probe tips had the shortercalculated distance, or determining that the at least two probe tips arealigned if equivalent distances are calculated for each of the at leasttwo probe tips.
 20. The method of claim 19, further comprising the stepof repeating the method until equivalent distances are calculated fromthe at least two probe tips.
 21. A method for characterizing a sampleusing a scanning probe adapter, the method comprising: providing a probehead comprising at least two probe tips; aligning the at least two probetips; scanning the sample with at least one of the at least two probetips to obtain a first measurement; and performing at least one ofstoring the obtained first measurement, transmitting the obtained firstmeasurement, and displaying the obtained first measurement.
 22. Themethod of claim 21, further comprising the steps of: contacting thesample with at least one of the at least two probe tips to obtain asecond measurement; and performing at least one of storing the obtainedsecond measurement, transmitting the obtained second measurement, ordisplaying the obtained second measurement.
 23. The method of claim 22,wherein the second measurement is an electrical measurement, amechanical measurement, an optical measurement, or a chemicalmeasurement.